The CMP community has been grown significantly last 10 years and needs a CMP tutorial program which not only updates recent issues in CMP technology but also provides the future direction. The tutorial program is to connect CMP community and to stimulate the ideas and collaboration among endusers, vendors and research institutes. The tutorial program will ever change as the technology and trend change. We invited best possible speakers from all over the world. You will enjoy the content and quality of CMP technology.
Chemical Mechanical Planarization User Group
National Taiwan University of Science and Technology
Taiwan Tech Global Research and Industry Alliance (GLORIA)
Taiwan Society for Abrasive Technology (TSAT)
Department of Materials Science and Engineering, NCTU
Metal Industries Research & Development Centre