|2019/10/02||Dear ICPT2019 participants,
Thanks for attending ICPT2019. The soft copy of conference proceedings is now available. Please download the file using the provided link before OCT 31:
Please check your email for password. If you have problems opening the file, please contact us at [email protected]
|2019/10/01||More Pictures! Sept. 16, Sept. 17, Sept. 18.|
|2019/09/23||ICPT 2019 thanks for all your contributions. Please click the link "Pictures" to download the priceless memories.|
Dear ICPT2019 attendees,
TSMC museum of innovation is closed for annual maintenance from Sept. 16 so we have to cancel the TSMC tech tour. Tour to ITRI is still available. Please fill the sheet before Sept. 9 to let us know if you are interested in ITRI tour or you need a refund. We apologize for any inconvenience this may cause.
Link to google sheet:
|2019/09/02||ICPT2019 program and schedule are available. Download|
|2019/08/24||Conference schedule is announced.|
|2019/08/24||Invited talks are announced.|
|2019/08/13||Instruction for presentation is announced.|
|2019/08/13||The floor plan of venue is announced.|
|2019/07/26||The deadline of Final Extended Abstract Submission is postponed to July 31, 2019.|
|2019/07/19||The deadline of Final Extended Abstract Submission is postponed to July 26, 2019.|
|2019/07/11||ICPT2019 tour programs now are available.|
|2019/07/08||ICPT2019 tutorial program now is available.|
|2019/07/02||The deadline of eary bird registration is postponed to July 12, 2019.|
|2019/07/02||The date of author notification is postponed to July 5, 2019.|
|2019/06/27||The date of author notification is postponed to July 2, 2019.|
|2019/05/16||The deadline of abstract submission is postponed to May 31, 2019.|
|2019/05/13||Registration is open. Please click here for more detail.|
CMP (chemical mechanical planarization), as one of the most important processes in the semiconductor manufacturing, has been developed and improved continuously year after year. It has built a certain position in related industries, and is expanding in its applied area. From the user's point of view, technical demand is becoming higher and higher, and additional applications beyond the semiconductor area are increasing.
ICPT (International Conference on Planarization/CMP Technology), is a magnificent opportunity to have discussions on CMP technologies, including FEOL and BEOL CMP, Fundamentals of CMP, Polishing Processes, Consumables, Equipment, 3D/TSV, Metrology, Cleaning, Defect Control, Process Control, etc. The conference provides a place where every relevant researcher and engineer can get together to discuss openly and exchange information widely.
Call for Papers
|Abstract Submission Deadline:
|Final Extended Abstract Submission:
The program committee welcomes the submission of abstracts for ICPT 2019. Abstracts of original work are requested on the following topics:
Abstracts will be scored according to the originality and significance of the work as well as the
the information and data included. Please indicate the preference of oral or poster presentation,
targeted topic area when submitting the abstract. Submit abstracts online, using the template
deadline for submitting abstracts is
April 30, 2019 May
At this stage (before April 30, 2019), authors could choose to submit short abstract or extended abstract; however, at the final stage (after notification of acceptance is given on June 30, 2019), only extended abstract will be accepted. Presentation of accepted papers at the Conference must be in English.
All submitted abstracts will be reviewed by peers and the Technical committee reserves the right to
or reject papers for inclusion in the program. Notices of acceptance of abstract will be sent out to
June 30, 2019.
Final Extended Abstract Submission
Final extended abstract submission, including figures, tables and references (must not exceed 2
pages) should be submitted online upon the notice of accepted abstracts. Extended abstracts are due
July 19, 2019 July 31, 2019.
Chemical Mechanical Planarization User Group
National Taiwan University of Science and Technology
Taiwan Tech Global Research and Industry Alliance (GLORIA)
Taiwan Society for Abrasive Technology (TSAT)
Department of Materials Science and Engineering, NCTU
Metal Industries Research & Development Centre